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Comparison of lateral and vertical switches for application as microrelay
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1998
Conference Paper
Title
Comparison of lateral and vertical switches for application as microrelay
Author(s)
Schiele, I.
Vogel, S.
Hillerich, B.
Kozlowski, F.
Mainwork
Ninth Micromechanics Europe Workshop, MME '98. Proceedings
Conference
Micromechanics Europe Workshop (MME) 1998
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS