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  4. Comparison of lateral and vertical switches for application as microrelay
 
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1998
Conference Paper
Title

Comparison of lateral and vertical switches for application as microrelay

Author(s)
Schiele, I.
Vogel, S.
Hillerich, B.
Kozlowski, F.
Mainwork
Ninth Micromechanics Europe Workshop, MME '98. Proceedings  
Conference
Micromechanics Europe Workshop (MME) 1998  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
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