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Model library and tool support for MEMS simulation
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2001
Conference Paper
Title
Model library and tool support for MEMS simulation
Author(s)
Schwarz, P.
Schneider, P.
Mainwork
MEMS design, fabrication, characterization, and packaging
Conference
Conference "MEMS Design, Fabrication, Characterization, and Packaging" 2001
DOI
10.1117/12.425295
Language
English
IIS-A
