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Temporary adhesive bonding with reconfiguration of known good dies for three-dimensional integrated systems
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2012
Book Article
Title
Temporary adhesive bonding with reconfiguration of known good dies for three-dimensional integrated systems
Author(s)
Klumpp, A.
Ramm, P.
Mainwork
Handbook of wafer bonding
DOI
10.1002/9783527644223.ch17
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT