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Microsensors using electrodes made in Si-technology
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1997
Book Article
Title
Microsensors using electrodes made in Si-technology
Author(s)
Hintsche, R.
Paeschke, M.
Uhlig, A.
Seitz, R.
Mainwork
Frontiers in biosensorics. Vol. 1: Fundamental aspects
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT