English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Sensor-actuator-arrays for dynamic atomic force microscopy and their application in temporary MESFET devices
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2004
Conference Paper
Title
Sensor-actuator-arrays for dynamic atomic force microscopy and their application in temporary MESFET devices
Author(s)
Müller, A.-D.
Müller, F.
Mehner, J.
Geßner, Thomas
Hietschold, M.
Mainwork
Actuator 2004
Conference
International Conference on New Actuators 2004
International Exhibition on Smart Actuators and Drive Systems 2004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS