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  4. Sensor-actuator-arrays for dynamic atomic force microscopy and their application in temporary MESFET devices
 
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2004
Conference Paper
Title

Sensor-actuator-arrays for dynamic atomic force microscopy and their application in temporary MESFET devices

Author(s)
Müller, A.-D.
Müller, F.
Mehner, J.
Geßner, Thomas  
Hietschold, M.
Mainwork
Actuator 2004  
Conference
International Conference on New Actuators 2004  
International Exhibition on Smart Actuators and Drive Systems 2004  
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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