Functional and depth-oriented characterization of technical surfaces

Today's Nanometrology is mainly focusing on measurement systems and parameters that only consider the top layer of a surface. But usually characteristics and functional properties of technical surfaces are not only limited to the outermost layer of the surface but depend on different surface regimes. The following article will therefore propose a more meaningful approach to a functional and depth-oriented sample characterization by considering a segmentation of the sample surface into layers of variable depth. A strategy for an optimum choice of measurement and analyzing tools as well as suitable parameters depending on the desired functionality of the sample will be presented and explained by giving a practical example. Core of this strategy is an internet-based database which will cover the metrology data of all measurement tools available for Micro- and Nanometrology.