• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Towards hybrid optical components via non-planar direct bonding
 
  • Details
  • Full
Options
2021
Conference Paper
Title

Towards hybrid optical components via non-planar direct bonding

Abstract
Here, we tackle the paradigm that direct bonding of planar wafers is not suitable on non-planar substrates. In doing so, we also present a new method for measuring the interface surface energy. This yields first guidelines for manufacturing novel optical components which combine different optical properties.
Author(s)
Birckigt, P.
Rothhardt, C.
Risse, S.
Zeitner, U.D.
Mainwork
7th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2021  
Conference
International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) 2021  
DOI
10.1109/LTB-3D53950.2021.9598402
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024