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MEMS based micro scanners: Components, technologies and applications
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2006
Conference Paper
Titel
MEMS based micro scanners: Components, technologies and applications
Author(s)
Geßner, T.
Bonitz, J.
Kaufmann, C.
Kurth, S.
Specht, H.
Hauptwerk
Actuator 2006. 10th International Conference on New Actuators & 4th International Exhibition on Smart Actuators and Drive Systems
Konferenz
International Conference on New Actuators 2006
International Exhibition on Smart Actuators and Drive Systems 2006
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
