Implementation of models for stress-reduced oxidation into 2-D simulator

Numerical models for local oxidation are usually based on an extension of the Deal-Grove model to two dimensions. However, for technological application a model for stress-reduced oxidation (SRO) is necessary to obtain realistic simulation results. The first approach to a quantitative analysis of this effect was published by Yosikawa which later was extended by Kao. In this work the above-mentioned models are analyzed and tested with respect to their applicability within a numerical simulator. Experimental data were obtained and compared with computer simulation results to check the significance of the related effects. (AIS-B)