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Technologies and MEMS sensor solutions for smart integrated systems
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2009
Book Article
Title
Technologies and MEMS sensor solutions for smart integrated systems
Author(s)
Hiller, Karla
Kurth, Steffen
Bertz, Andreas
Geßner, Thomas
Mainwork
Research on microreliability and nanoreliability. The micro materials center on display - on the occasion of Bernd Michel´s 60th Birthday
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
