Active-matrix-addressed deformable-elastomer-layer light-valve projection. Active matrix and electronics
Abstract
Monolithic active matrices for light-valve application were fabricated using silicon CMOS technology. Features are signal-handling capabilities of 30 V, optimized surface planarity, and excellent light immunity. The on-chip addressing circuitry exceeds television requirements. Results for small matrices are presented; larger versions (up to standard television) are under development.
