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Monolithic micro-positioning stage on piezo thick film technology
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2014
Conference Paper
Titel
Monolithic micro-positioning stage on piezo thick film technology
Author(s)
Bramlage, Bernhard
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Ernst, Dörthe
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Gebhardt, Sylvia
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Hauptwerk
Actuator 2014, 14th International Conference on New Actuators & 8th International Exhibition on Smart Actuators and Drive Systems. Conference Proceedings
Konferenz
International Conference on New Actuators 2014
International Exhibition on Smart Actuators and Drive Systems 2014
Language
English
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Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Tags
PZT
thick film
actuator
Al2O3
