This article is focused on advanced technologies for automated macromodel generation of Micro-Electro-Mechanical Systems (MEMS) using finite element solvers for data extraction and response surface function fit for the governing equations. Dynamically accurate device representations can be achieved for microstructures and their most important interactions with thermal, electrostatic and fluid fields which are inherent in sensor and actuator applications. Results are compact behavioral descriptions based on analytical terms which can directly be transferred to any system simulator for virtual prototyping and device analyses.
