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  4. Si interposer technologies for three dimensional sensor systems
 
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2011
Conference Paper
Title

Si interposer technologies for three dimensional sensor systems

Author(s)
Roscher, Frank  
Baum, Mario  
Gebhardt, C.
Raukopf, S.
Wiemer, Maik  
Geßner, Thomas  
Mainwork
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM  
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011  
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS  
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