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  4. Si interposer technologies for three dimensional sensor systems
 
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2011
Conference Paper
Titel

Si interposer technologies for three dimensional sensor systems
Author(s)
Roscher, F.
Baum, M.
Gebhardt, C.
Raukopf, S.
Wiemer, M.
Gessner, T.
Hauptwerk
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Konferenz
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
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Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
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