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Si interposer technologies for three dimensional sensor systems
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2011
Conference Paper
Title
Si interposer technologies for three dimensional sensor systems
Author(s)
Roscher, Frank
Baum, Mario
Gebhardt, C.
Raukopf, S.
Wiemer, Maik
Geßner, Thomas
Mainwork
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
