Development of passive alignment techniques for the assembly of hybrid microsystems
Entwicklung passiver Justiertechniken für die Montage hybrider Mikrosysteme
Conventional machining methods have been developed to meet the standards of ultra precision machining. Special milling processes utilizing mono-crystalline diamond tools, the so-called fly-cutting processes, are used successfully to manufacture highly precise microstructures with an optical surface finish. In micro assembly often positioning accuracies of only a few micro meters are needed. An approach of the Fraunhofer IPT is to achieve these accuracies using passive alignment strategies. In this paper, the ultra precision machining of the v-groove structures as well as their passive alignment capacities for micro assembly tasks are presented.