Development of passive alignment techniques for the assembly of hybrid microsystems

Conventional machining methods have been developed to meet the standards of ultra precision machining. Special milling processes utilizing mono-crystalline diamond tools, the so-called fly-cutting processes, are used successfully to manufacture highly precise microstructures with an optical surface finish. In micro assembly often positioning accuracies of only a few micro meters are needed. An approach of the Fraunhofer IPT is to achieve these accuracies using passive alignment strategies. In this paper, the ultra precision machining of the v-groove structures as well as their passive alignment capacities for micro assembly tasks are presented.