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Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
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2005
Conference Paper
Title
Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
Author(s)
Häublein, V.
Frey, L.
Ryssel, H.
Mainwork
Ion implantation technology. Proceedings of the 15th International Conference on Ion Implantation Technology 2004
Conference
International Conference on Ion Implantation Technology (IIT) 2004
DOI
10.1016/j.nimb.2005.05.012
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
