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Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
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2005
Conference Paper
Titel
Additional peaks in mass spectra due to charge exchange events and dissociation of molecular ions during extraction
Author(s)
Häublein, V.
Frey, L.
Ryssel, H.
Hauptwerk
Ion implantation technology. Proceedings of the 15th International Conference on Ion Implantation Technology 2004
Konferenz
International Conference on Ion Implantation Technology (IIT) 2004
DOI
10.1016/j.nimb.2005.05.012
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
