Packaging aspects of MEMS-based optical systems

2007

Conference Paper

Author(s)

Saupe, R.

Otto, T.

Weiss, A.

Stock, V.

Gessner, T.

Fraunhofer-Institut für Elektronische Nanosysteme ENAS

Hauptwerk

Smart systems integration 2007

Konferenz

European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007