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  4. Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
 
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2018
Conference Paper
Title

Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Abstract
We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48mm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.
Author(s)
Gehner, A.
Dürr, P.
Kunze, D.
Rudloff, D.
Elgner, A.
Heber, J.
Francés, S.
Skupsch, C.
Torlee, H.
Eckert, M.
Friedrichs, M.
Schmidt, J.
Pufe, W.
Döring, S.
Hohle, C.
Schulze, M.
Wagner, M.
Mainwork
International Conference on Optical MEMS and Nanophotonics, OMN 2018. Proceedings  
Conference
International Conference on Optical MEMS and Nanophotonics (OMN) 2018  
DOI
10.1109/OMN.2018.8454624
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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