2018
Conference Paper
Title

Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Abstract
We have developed a novel 512 × 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48mm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with standard deviations of better than 0.025°. The device is realized in a fully CMOS compatible process with an underlying integrated address circuitry.
Author(s)
Gehner, A.
Dürr, P.
Kunze, D.
Rudloff, D.
Elgner, A.
Heber, J.
Francés, S.
Skupsch, C.
Torlee, H.
Eckert, M.
Friedrichs, M.
Schmidt, J.
Pufe, W.
Döring, S.
Hohle, C.
Schulze, M.
Wagner, M.
Mainwork
Conference
DOI
Language
English