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  4. Enhanced large signal performance of PZT thick film actuators for active micro-optics
 
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2013
Conference Paper
Titel

Enhanced large signal performance of PZT thick film actuators for active micro-optics

Abstract
Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 mm.
Author(s)
Ernst, Dörthe
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Bramlage, Bernhard
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Gebhardt, Sylvia
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Schönecker, Andreas
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Pabst, Oliver
Schiller-Universität Jena
Schreiner, Hans Jürgen
CeramTec GmbH
Hauptwerk
IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013
Konferenz
International Symposium on Applications of Ferroelectric (ISAF) 2013
Workshop on Piezoresponse Force Microscopy (PFM) 2013
DOI
10.1109/ISAF.2013.6748714
File(s)
N-287492.pdf (3.05 MB)
Language
English
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Fraunhofer-Institut für Keramische Technologien und Systeme IKTS
Tags
  • actuator

  • cantilever

  • PZT

  • screen printing

  • thick film

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