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  4. Enhanced large signal performance of PZT thick film actuators for active micro-optics
 
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2013
Conference Paper
Title

Enhanced large signal performance of PZT thick film actuators for active micro-optics

Abstract
Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 mm.
Author(s)
Ernst, Dörthe
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Bramlage, Bernhard
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Gebhardt, Sylvia  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Schönecker, Andreas
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Pabst, Oliver
Schiller-Universität Jena
Schreiner, Hans Jürgen
CeramTec GmbH
Mainwork
IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy, ISAF/PFM 2013  
Conference
International Symposium on Applications of Ferroelectric (ISAF) 2013  
Workshop on Piezoresponse Force Microscopy (PFM) 2013  
Open Access
File(s)
Download (3.05 MB)
Rights
Use according to copyright law
DOI
10.24406/publica-r-382764
10.1109/ISAF.2013.6748714
Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Keyword(s)
  • actuator

  • cantilever

  • PZT

  • screen printing

  • thick film

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