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  4. Capabilities of electron beam evaporation for the deposition of compounds
 
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1990
Conference Paper
Titel

Capabilities of electron beam evaporation for the deposition of compounds

Author(s)
Schiller, S.
Neumann, M.
Hötzsch, G.
Hauptwerk
Fourth International Conference on Vacuum Web Coating 1990. Proceedings
Konferenz
International Conference on Vacuum Web Coating 1990
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Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
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