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Capabilities of electron beam evaporation for the deposition of compounds
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1990
Conference Paper
Title
Capabilities of electron beam evaporation for the deposition of compounds
Author(s)
Schiller, S.
Neumann, M.
Hötzsch, G.
Mainwork
Fourth International Conference on Vacuum Web Coating 1990. Proceedings
Conference
International Conference on Vacuum Web Coating 1990
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
