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  4. A test system for micromirror arrays
 
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2001
Conference Paper
Titel

A test system for micromirror arrays

Abstract
Over the last few years, high resolution spatial light modulators (SLM), with over 2 million pixels, each capable of being addressed individually for optical applications have been developed at IMS Dresden. SLM. In order to be able to supply a qualified and correspondingly tested component of the respective technology to industrial partners in the future, it is necessary to construct an appropriate control and test facility for the SLM. The objective is a fully automatic test stand for the testing of finished components and, in addition, also for measuring tasks in further research and development.
Author(s)
Tanneberger, T.
Hauptwerk
Veeco Usermeeting 2001. Abstracts
Konferenz
Veeco Usermeeting 2001
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Language
English
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IMS2
Tags
  • Mikrospiegel

  • automatisches testsystem

  • micromirror

  • spatial light modulator

  • Pixeldefekt

  • Fertigung

  • test

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