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  4. Scanning force microscopy of coatings and nanostructured surfaces
 
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2007
Conference Paper
Titel

Scanning force microscopy of coatings and nanostructured surfaces

Abstract
The capability of scanning force microscopy and subsequent PSD data evaluation for the investigation of functional surface nanostructures is demonstrated. Critical effects emerging from measurements in the nanometer scale are discussed.
Author(s)
Flemming, M.
Duparre, A.
Hauptwerk
Optical Interference Coatings 2007. CD-ROM
Konferenz
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) 2007
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Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
Tags
  • scanning microscopy

  • metrology

  • coating

  • roughness

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