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Strain measurement in micrometrology
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1999
Conference Paper
Titel
Strain measurement in micrometrology
Author(s)
Vogel, D.
Kühnert, R.
Michel, B.
Hauptwerk
Advanced photonic sensors and applications
Konferenz
Conference on Advanced Photonic Sensors and Applications 1999
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
