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Fraunhofer-Gesellschaft
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Fraunhofer-Gesellschaft
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Process Modelling and Device Optimisation for Submicron Technologies
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Project Title
Process Modelling and Device Optimisation for Submicron Technologies
OpenAIRE ID
2197
Start
01 February 1989
End
31 March 1993
Framework
FP2
fundingProgram
FP2-ESPRIT 2
