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Smart inspection system for high speed and multifunctional testing of MEMS and MOEMS
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SMARTIEHS
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Project Partner
CLO
Project Title
Smart inspection system for high speed and multifunctional testing of MEMS and MOEMS
OpenAIRE ID
223935
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Start Date
April 1, 2008
End Date
September 30, 2011
Framework Progam
FP7
Funding Program
FP7-ICT
