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Funding Code
16ESE0044S
Project Title
16ESE0044S
Description
Verbundprojekt: Seven Nanometer Technology - SeNaTe -, Teilvorhaben: Improved reflection coatings for optical systems with 7 nm resolution
Keyword(s)
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Start Date
2015
End Date
31.03.2018
Framework Progam
Funding Program
BMBF