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Projekt
Joint European Enterprise in Phase-Shift, Advanced Mask Technology: towards 0.25 micron
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JEEPS
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Project Partner
Project Title
Joint European Enterprise in Phase-Shift, Advanced Mask Technology: towards 0.25 micron
OpenAIRE ID
6908
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Start Date
June 15, 1992
End Date
June 14, 1994
Framework Progam
FP3
Funding Program
FP3-ESPRIT 3