Verfahren zur strukturierten Energieuebertragung mit Elektronenstrahlen

The method uses a focusable, two-dimensionally deflectable electron beam. The object (1) is moved towards the beam contactlessly beneath a mask (6). The beam is passed via the mask apertures approximately in the direction of motion of the object whilst oscillating at high frequency approximately perpendicularly to the object's direction of motion. The electron beam is passed over the apertures in the mask at a very high speed compared with the speed at which the object is moving. USE - For transferring energy to preferably flat surfaces of objects, e.g. for structuring surfaces. ADVANTAGE - Limits of conventional techniques are overcome to enable very small surface elements, e.g. pixels, to be defined on surface.