Vorrichtung und Verfahren zur optischen Profilmessung, insbesondere an gekruemmten Objektoberflaechen
The system directs light from a source (1) via a linear transmission grating (2) and telescope (3,4) at the surface (5) where an image (G') of the grating is formed. The reflection passes through another telescope (6,7) to a charge-coupled device matrix (8) whose receiving surface is conjugated with the plane of the grating image. The periodic distribution of brightness is generated by the beam incident at an angle of more than 45 deg. to the normal at the curved surface. The matrix receives a sharply focused image of the region about the line of intersection. USE - On e.g. cylinder block of vehicular combustion engine. Surface roughness is also measurable in micrometric range at low cost.
DE 1995-19545367 A: 19951205