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Patent
Title
Verfahren zur Herstellung von polykristallinen Diamantschichten
Other Title
Process for the production of polycrystalline diamond coatings
Abstract
The invention relates to a process for the production of polycrystalline diamond layers on substrates with basically known process gases such as hydrogen, methane, oxygen or similar, by means of a CVD process, whereby the growth phase of the diamond layer is performed in the presence of an additional process gas which consists of N<-2 and/or nitrogen-containing gas mixtures such as air or N<-2 /H<-2 and/or nitrogen-hydrogen, nitrogen-oxygen or nitrogen-halogen compounds and/or mixtures of the nitrogen compounds described above with gases such as oxygen or hydrogen, whereby nitrogen is part of the process gas with 0.005 to 1 percent by volume or there is a relation of nitrogen to carbon (N/C ratio) of 0.001 to 0.2 of the total process gas.
Inventor(s)
Boettger, E.
Bluhm, A.
Jiang, X.
Schaefer, L.
Patent Number
1993-4331701
Publication Date
1995
Language
German