Mikromechanische Einrichtung

The description relates to a micromechanical device consisting of a cogwheel mounted in a rotating bearing on a substrate. In known devices, a rotary mounted cogwheel moves, for example, by means of an airstream supplied externally, since there is no direct drive. The device according to the invention has a cogwheel which is directly rotated by a thermomechanical drive. This produces a micromechanical motor which is suitable, for example, for applications in microrobotics and medical technology.