Patent
Title

Chemischer Festkörpersensor

Other Title
Carbon dioxide sensor
Abstract
The invention relates to a carbon dioxide sensor comprising a substrate carrier on which a heating element with conductor terminals is attached to the underside and interdigital electrodes are arranged on the upper side and on it a carbon-dioxide-sensitive material, whereby the material mainly consists of CuO and/or TiO<-3 and is designed as a thick film of about 50 - 200 <my>m.
Inventor(s)
Haeusler, A.
Meyer, J.-U.
Link to Espacenet
Patent Number
1994-4437692
Publication Date
1998
Language
German