Mikromechanisch gefertigte Flussrestriktionsvorrichtung

The system has a passage opening (12) formed in the first main surface of the substrate (10), with a duct (16) formed in a second main surface of the substrate, communicating fluidly with the passage opening, also with a diaphragm (22). One diaphragm electrode (26) at least is formed on the diaphragm. A cover system (30) is applied on the second main surface of the substrate, such that the diaphragm electrode together with the duct, define a flow resistance of the flow restriction system. The cover system has a counter electrode (32) which spaced at a distance from the diaphragm electrode, lies opposite the same. In such a manner that the diaphragm electrode and the counter electrode define a capacitive pressure pick-up. A passage opening is formed in the cover system, which has fluid communication with the duct. USE/ADVANTAGE - Liquid dosing field. Cost effective and simple micro mechanically manufactured flow restriction system, with at least one integrated pressure sensor.