Konzept zum Auswaehlen eines optimierten Bewertungsmerkmalsteilsatzes fuer eine Inspektion von Freiformoberflaechen und Konzept zum Inspizieren einer Freiformoberflaeche

DE 202009013865 U1 UPAB: 20100408 NOVELTY - The device has an evaluation device evaluating each pixel or a subset of pixels of samples of reference set with each combination of evaluation characteristics (26) for receiving evaluated defect or non-defect condition (28) of a surface region. A comparing device compares evaluated defect or not defect condition with defect or not defect reference condition for receiving a detecting rate for each combination of evaluation characteristics. A determining device determines optimized evaluation characteristic subset based on the detecting rate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a device for inspecting an open die surface. USE - Device for selecting an optimized evaluation characteristic subset for inspecting an open die surface. ADVANTAGE - The comparing device compares evaluated defect or not defect condition with defect or not defect reference condition for receiving the detecting rate for each combination of evaluation characteristics, and the determining device determines optimized evaluation characteristic subset based on the detecting rate, thus inspecting the open die surface in a simple and cost effective manner.