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Patent
Title

Verfahren und Vorrichtung zum Aufnehmen eines Objektes

Other Title
Process and device for reciving an object
Abstract
In order to produce a sharply focused image, in particular a magnified image of an object, a process is proposed by which a structure is projected onto the object, the object is recorded in several planes (focal planes) perpendicular to the direction of observation, the contrast of the adjacent image areas is determined for each plane, the contrast between corresponding image areas of different planes are compared with each other, image areas of maximum contrast are selected from various planes and at least the latter is provided as a contract maximum image for further processing.
Inventor(s)
Scheuermann, T.
Eyerer, P.
Fraunhofer-Institut für Chemische Technologie ICT  
Elsner, P.
Geissler, A.
Link to:
Espacenet
Patent Number
1995-19502472
Publication Date
1997
Language
German
Fraunhofer-Institut für Chemische Technologie ICT  
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