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Reduction of oxygen content in a process chamber
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Patent
Title
Reduction of oxygen content in a process chamber
Other Title
Verminderung des Sauerstoffgehaltes in einer Prozesskammer
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Inventor(s)
Pfaff, Aron
Fraunhofer-Institut für Kurzzeitdynamik Ernst-Mach-Institut EMI
Link to Espacenet
https://worldwide-i.espacenet.com/publicationDetails/biblio?DB=EPODOC&II=0&ND=3&adjacent=true&locale=en_EP&FT=D&date=20240103&CC=EP&NR=4299315A1&KC=A1
Patent Number
EP4299315 A1
Publication Date
January 3, 2024
Language
English
Fraunhofer-Institut für Kurzzeitdynamik Ernst-Mach-Institut EMI
