Mikrominiaturisierte elektrostatische Pumpe

An electrostatic pump features two electrodes arranged at a distance from one another; said electrodes are basically aligned in the direction of pump flow and a potential can be applied to said electrodes to cause an ionic current to flow between the electrodes. According to the invention and for purposes of further microminiaturization, the pump features two stacked semiconductor elements aligned in the direction of pump flow; said electrodes are structured such that the electrodes form a single component of the conductor element.