Verfahren zur Regelung von Glimmentladungen mit pulsfoermiger Energieversorgung

A procedure for controlling glow discharge processes has pulse-shaped energy in-feed into at least two electrodes by control of a process parameter using a control circuit. The pulse frequency, period length or length of individual positive and/or negative half-waves of the energy fed in are measured. From the measured size, a signal is derived. By comparison of this with a given theoretical value, a difference signal is formed and with this, at least one process parameter is controlled. As a process parameter, the inert gas flow, reactive gas flow, inert gas/reactive gas mixture, discharge current, discharge voltage and discharge power are all controlled. ADVANTAGE - Low expense in apparatus and use of simple components, allowing stable, defined and guided process.