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Patent
Title
Sensorarray
Other Title
Sensor array
Abstract
Sensor array comprising metal oxide semiconductor gas sensors which are operated as resistors, whereby each sensor consists of a contact electrode (contact pad) applied to a substrate and of a sensor-active layer deposited on said substrate, whereby at least some of the sensors have a different contact spacing L with the contact pads of other sensors and/or a different dimensioning of the surface of the sensor-active layer and/or a different contact boundary surface A between the contact and the sensor-active layer.
Inventor(s)
Steiner, K.
Hoefer, U.
Patent Number
1994-4424342
Publication Date
1995
Language
German