The micro valve has a valve body with aperture, and a relatively moveable valve plate with fluid passages. The sealing edge (42) of the valve aperture is formed, so that it is longer than that of a sealing edge of a similarly-sized square valve aperture, e.g. twice as long. The sealing edge is meander-shaped and intake and discharge channels (44,46) with a length and width are formed which determine the length of the sealing edge. The valve body is rigid, and the valve plate is elastically suspended. The micro valve is an electrostatic or piezoelectric valve. USE/ADVANTAGE - Especially valves with a valve plate at a small distance to the valve aperture, allowing increased throughflow, without influencing pressure dependency.
DE 1995-19546181 A: 19951211