Diamant-Siliciumcarbid-Mischschicht, Verfahren zu ihrer Herstellung und ihre Verwendung

The variability of the properties in previously known coatings is low. These coatings also exhibit insufficient adhesion on certain substrate materials. In the diamond silicon carbide mixture coating according to the invention, a coating comprising a variable range of properties and good adhesion is provided on a large number of substrate materials. The diamond silicon carbide mixture coating consists of an intimate mixture of diamond and <beta> SiC phases, where the <beta> SiC portion can be varied across the coating thickness. The thickness is obtainable by means of a CVD process by which a gas mixture comprising hydrogen, tetramethylsilane and hydrocarbons is used in the reactor, the parameters of the gas mixture being adjusted so that the growth conditions are fulfilled for both diamond and <beta> SiC simultaneously. The coating according to the invention is used in the manufacture of thin coatings, in particular for coating components or tools and for the manufacture or coating of electronic components.