Anlage zur Behandlung von Objekten unter Reinluftraum- Bedingungen

In a system for handling objects under cleanroom conditions, an automatic, multi-stage handling of an object (11) based on the single chamber principle can be performed in at least one process chamber (1) involving the inflow and outflow of fluids (4, 5, 15, 21, 24, 31), a chamber pot (3) and a removable chamber cover (2) in such a way that the process chamber (1) is formed for the performance of several process steps for handling the objects (11). The object (11), for example a wafer, is arranged in the process chamber (1), preferably on a rotating object support (13) in such a way that both sides can be handled with fluids simultaneously.