VERFAHREN UND VORRICHTUNG ZUR GEPULSTEN HOCHSTROMBELASTUNG INTEGRIERTER SCHALTUNGEN UND STRUKTUREN

NOVELTY - The device has a fixture (9,10) for a substrate (8) which contains one or several integrated circuits and structures to be charged. A pulse injector has a reference electrode (3) whose distance to the substrate is adjustable, a contact electrode (7) for contacting connection surface areas of the integrated circuits and structures, and a carrier (4) for the contact- and reference electrodes. The contact electrode projects through a gap or aperture in the surface of the reference electrode, whose surface area is sufficiently large to cover the respective integrated circuit to be charged. USE - For testing electrostatic discharge resilience of protection structure in integrated circuit. ADVANTAGE - Enables reproducible testing of complete integrated circuit with or without casing, and even on wafer surface.