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Patent
Title
Duennschicht-Interferometer
Other Title
Thin-film interferometer
Abstract
The invention relates to a thin-film interferometer, in particular destined for chemical or biochemical measuring and analysis systems, comprising a planar waveguide in the form of an integrated optical sensor element which comprises a thin, light guiding film, partially coated with a covering layer. According to the invention, the light guiding film of the interferometer forms at least one measuring and reference section for light guided in the film and light modes of the light are interferable after passing through the measuring and reference section within the light guiding film.
Inventor(s)
Patent Number
1992-4228535
Publication Date
1995
Language
German