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Patent
Title

Lissajous dual-axial scan component

Abstract
The present disclosure provides a Lissajous dual-axial scan component (100) that includes an outer frame (102), a first pair of supports (104A-B), a second pair of supports (106A-B), an inner frame (108), a mirror (110), a sensing arrangement (112), a controller (114) and a memory (116). The memory (116) stores multiple tuples each including a first-axial bias frequency value, a second-axial bias frequency value, and a phase difference between actual driving frequencies (i.e. a first-axial bias frequency and a second-axial bias frequency) of the mirror (110). The controller (114) is coupled to the sensing arrangement (112) to receive signals indicative of current resonant frequencies of the mirror (110) and configured to select one of the tuples from the memory (116) based on the signals received from the sensing arrangement (112) and set the applied bias frequencies, and their phase difference, according to the selected tuple.
Inventor(s)
Reher, Marcel
Wantoch, Thomas
Hofmann, Ulrich
Petrak, Oleg
Niekiel, Malte Florian  
Fraunhofer-Institut für Siliziumtechnologie ISIT  
Janicke, Christian
Cao, Yong
Link to:
Espacenet
Patent Number
WO2022100846 A1
Publication Date
May 19, 2022
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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