Elektrisches Widerstandsbauelement mit CrSi-Widerstandsschicht

Electrical resistance element is made of a substrate with at least one coating of a Cr-Si based alloy comprising (in at%): 5-50 Cr; 10-70 Si; 5-50 O; 1-50 of one from B,C,N. USE - The element is used as resistor in miniaturised electronic devices. ADVANTAGE - The resistor has a minimum temperature coefficient of resistance of less that 100ppm/K, a resistance of the order of 1M and can have measurements of about 1mm.