Verfahren zur emissionsfreien, insbesondere FCKW-freien, Reinigung von Praezisions-Optiken bzw. -Optikbaugruppen

A process is described for the emission-free cleaning of precision optics comprising the following process stages: (a) Pretreatment process, comprising cleaning in a bath containing buffered tap water, added with tensides as wetting agent, whereby provision is made for stirring the bath and fine filtering with additional action using ultrasound, preferably at variable frequencies and amplitudes; this is followed by rinsing using buffered tap water free of wetting agent with the simultanous fine-filtering of make-up water and action by ultrasound; this is followed by another stage of cleaning and rinsing; this is followed by rinsing using buffered de-ionized water under the action of ultrasound and spraying with de-ionized water while fine-filtering the bath at the same time; (b) Breaking down organic contamination and tenside residue down to CO<-2 by means of short-wave UV radiation or highly accelerated electrons or corona discharge while maintaining a pressureless oxygen atmosphere o r an oxygen atmosphere pressure of up to 5 bar or a pressureless ozone atmosphere or an ozone atmosphere pressure of up to 2 bar; (c) Examining the interfaces of the optics made of glass in respect to reactions to organic radicals, to decomposition reactions on the glass surface or to changes in the surface geometry; (d) Main treatment process, comprising ...