Streulichtmessanordnung zur Untersuchung der Oberflaechenrauheit

Scattered light measuring setup to analyze surface roughness based on the principle of angular-resolution scattered light measurement by means of one or several receiver arrays, characterized by the fact that the individual receivers of the arrays are arranged on curved supports in such a way that the geometric expansion of the individual receivers corresponds in each case to an equidistant interval within the local frequency range.