Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen

(A1) Bei einer Vorrichtung zum Erfassen von Umgebungs- und Betriebsparametern in Plasmen, die ueber eine Anzahl von Gitterstrukturen (1, 2) und ueber einen innenliegenden Metallkoerper (5) verfuegt, die beziehungsweise der jeweils mit elektrischen Potentialen beaufschlagbar sind, weist der Metallkoerper (5) wenigstens eine Eintrittsausnehmung (6) auf, die entlang einer Vorzugsrichtung (7) eine ortsaufgeloeste Messung gestattet.

DE 102009048120 A1 UPAB: 20110425 NOVELTY - The device has outer and inner double grids (1, 2) lying into each other, and a metal body (5) arranged within the inner double grid. The double grids and the metal body are separated from each other by electrically insulating spacers (12-14) and are selectively loaded with preset electric potentials. The metal body has an inlet recess (6) arranged in such a manner that the metal body has distinguished preferential directions for detecting electromagnetic radiations (11) and/or particles (17) impinging at the metal body. USE - Device for detecting surrounding- and operating parameters in plasma. ADVANTAGE - The metal body has the inlet recess arranged in such a manner that the metal body has the distinguished preferential directions for detecting the electromagnetic radiations and/or particles impinging at the metal body, thus reducing electrical surface changes caused by depositions developed in deposition plasma processes, and enabling space-resolved detection of the surrounding- and operating parameters in plasma.