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Patent
Title
Chemischer Sensor
Other Title
Electrode arrangement for the signal detection of gas-sensitive layers
Abstract
The invention relates to an electrode arrangement for the signal detection of gas-sensitive layers, comprising a first bottom electrode having an interdigital structure and a second upper electrode having an interdigital structure and the intermediate gas-sensitive layers acting as a humidity or gas sensor, whereby the electrode terminals a, a' and b, b' are positioned above each other and the interdigital structure or finger is arranged in such as way that the finger structures above each other have a reversed (+, -) voltage polarity.
Inventor(s)
Qu, W.
Meyer, J.-U.
Patent Number
1994-4433102
Publication Date
1998
Language
German